Method of fabricating of diamond moth-eye surface

Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Shaping against forming surface

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

427249, 427122, 427309, 1563066, 1563082, 156652, 156653, 423446, B29C 3376, C23C 1622

Patent

active

053343425

ABSTRACT:
A high temperature resist process is combined with microlithographic patterning for the production of materials, such as diamond films, that require a high temperature deposition environment. For diamond films, a high temperature silicon nitride resist can be used for microlithographic patterning of a silicon substrate to provide a uniform distribution of diamond nucleation sites and to improve diamond film adhesion to the substrate. A fine-grained nucleation geometry, established at the nucleation sites, is maintained as the diamond film is deposited over the entire substrate after the silicon nitride resist is removed. The process can be extended to form surface relief features, such as "moth eye" surfaces, and microstructures of fine-grained polycrystalline diamond, such as rotatable microgears and surface relief patterns, that have the desirable characteristics of hardness, wear resistance, thermal conductivity, chemical inertness, anti-reflectance, and a low coefficient of friction.

REFERENCES:
patent: 4907846 (1990-03-01), Tustison et al.
patent: 5082359 (1992-01-01), Kirkpatrick

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of fabricating of diamond moth-eye surface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating of diamond moth-eye surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating of diamond moth-eye surface will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-63624

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.