Method of fabricating nitride semiconductor and method of...

Details Method of fabricating nitride semiconductor and method of... Method of fabricating nitride semiconductor and method of...

2005-11-01

2005-11-01

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S046000, C438S604000, C438S779000

Reexamination Certificate

active

06960482

ABSTRACT:
A method of fabricating a nitride semiconductor includes the steps of forming a nitride semiconductor doped with a p-type impurity, treating the surface of the nitride semiconductor in an atmosphere containing active oxygen to remove carbon remaining on the surface and form an oxide film thereon, and activating the p-type impurity to turn the conductive type of the nitride semiconductor into a p-type. Since carbon remaining on the surface of the nitride semiconductor is removed and the oxide film is formed thereon, the surface of the nitride semiconductor is prevented from being deteriorated by the activating treatment and the rate of activating the p-type impurity is enhanced. As a result, it is possible to reduce the contact resistance of the nitride semiconductor with an electrode and, hence, the variation in characteristics of the nitride semiconductor.

REFERENCES:
patent: 5902130 (1999-05-01), Passlack et al.
patent: 6057564 (2000-05-01), Rennie
patent: 6093952 (2000-07-01), Bandic et al.
patent: 6248607 (2001-06-01), Tsutsui
patent: 6586328 (2003-07-01), Adesida et al.
patent: 2002/0004254 (2002-01-01), Miki et al.
patent: 2002/0055274 (2002-05-01), Takeya
patent: 2002/0072204 (2002-06-01), Uemura et al.
patent: 2002/0185732 (2002-12-01), Ho et al.
patent: 2003/0042496 (2003-03-01), Sasaoka
patent: 3-120885 (1991-05-01), None

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