Method of fabricating micromirror device

Details Method of fabricating micromirror device Method of fabricating micromirror device

2011-01-11

2011-01-11

Nguyen, Donghai D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C359S291000

Reexamination Certificate

active

07866036

ABSTRACT:
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.

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