Method of fabricating microlens structure

Details Method of fabricating microlens structure Method of fabricating microlens structure

2006-08-15

2008-07-01

Spector, David N (Department: 2873)

Plastic and nonmetallic article shaping or treating: processes

Optical article shaping or treating

Light polarizing article or holographic article

C359S620000, C359S626000

Reexamination Certificate

active

07393477

ABSTRACT:
The present invention provides a method of fabricating a microlens, comprising providing a substrate with at least a dielectric layer thereon, forming a first thin film on the dielectric layer surface, etching the first thin film to form at least a micro bump, and forming a second thin film on the micro bump surface and dielectric layer surface, wherein the second thin film and the micro bump form the microlens. The present invention microlens can be applied in the environment with high temperature, and a passivation layer is not required for the present invention microlens.

REFERENCES:
patent: 2006/0097297 (2006-05-01), Lee
patent: 2008/0023734 (2008-01-01), Cho

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