Fishing – trapping – and vermin destroying
Patent
1995-11-07
1998-05-19
Tsai, Jey
Fishing, trapping, and vermin destroying
437192, 437922, H01L 2170, H01L 2700
Patent
active
057535280
ABSTRACT:
A metal-to-metal antifuse comprises a lower electrode comprising a first metal layer in an integrated circuit, a first barrier layer formed from a layer of TiW:N disposed over the lower electrode, a layer of antifuse material formed from amorphous silicon over the first barrier layer, a second barrier layer formed from a layer of TiW:N disposed over the layer of antifuse material, said second barrier layer, and an upper electrode over the second barrier layer, the upper electrode comprising a second metal layer in the integrated circuit.
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Forouhi Abdul R.
Wang Iton
Actel Corporation
Tsai Jey
LandOfFree
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