Method of fabricating liquid crystal on silicon display panel

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element

Reexamination Certificate

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C438S609000

Reexamination Certificate

active

06872587

ABSTRACT:
A semiconductor substrate with a control circuit and electrodes thereon is used in a method of fabricating a liquid crystal on silicon display panel. First, a transparent conductive layer is formed on the semiconductor substrate and a cell gap is formed between the semiconductor substrate and the transparent conductive layer. A liquid crystal filling process is performed to fill the cell gap with a liquid crystal material including liquid crystal molecules and monomers. A uniform magnetic field is formed to pass through the panel so that the liquid crystal molecules and monomers are aligned in a predetermined tilt direction along the direction of the magnetic field. Next, a curing process is performed so that the monomers form a polymer network with the predetermined tilt direction. Thus, when an electric field is formed between the electrodes and the transparent conductive layer, the liquid crystal molecules rotate along the predetermined tilt direction.

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