Method of fabricating laser controlled nanolithography

Details Method of fabricating laser controlled nanolithography Method of fabricating laser controlled nanolithography

1993-02-16

1994-11-01

Kunemund, Robert

Fishing, trapping, and vermin destroying

437 80, 437 81, 437948, 250251, H01L 21268, H01L 21306

Patent

active

053607643

ABSTRACT:
A method of depositing atoms on a substrate in which a beam of atoms is optically focused utilizing a laser beam. The laser beam is used to form a standing wave above the surface of a substrate. As the beam of atoms is passed through the standing wave, the atoms are focused by dipole force interactions. The deposition of atoms is focused into parallel lines which coincide with the minima of the standing wave. The use of two standing waves allows for focusing the atoms into discrete dots or spots. Relative movement between the substrate and the standing wave(s) allows for depositing atoms in a scanning manner. Various nanostructures can be made by the disclosed method.

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