Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1997-11-10
2000-01-25
Killos, Paul J.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556137, 556 9, 556 13, 556 16, C07F 1500
Patent
active
06018065&
ABSTRACT:
A method of forming an iridium-containing film on a substrate, from an iridium-contaiing precursor thereof which is decomposable to deposit iridium on the substrate, by decomposing the precursor and depositing iridium on the substrate in an oxidizing ambient environment which may for example contain an oxidizing gas such as oxygen, ozone, air, and nitrogen oxide. Useful precursors include Lewis base stabilized Ir(I) .beta.-diketonates and Lewis base stabilized Ir(I) .beta.-ketoiminates. The iridium deposited on the substrate may then be etched for patterning an electrode, followed by depositing on the electrode a dielectric or ferroelectric material, for fabrication of thin film capacitor semiconductor devices such as DRAMs, FRAMs, hybrid systems, smart cards and communication systems.
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Baum Thomas H.
Xu Chong-Ying
Advanced Technology & Materials Inc.
Hultquist Steven J.
Killos Paul J.
Vollano Jean F.
Zitzmann Oliver A.M.
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