Method of fabricating inkjet printhead with projections...

Details Method of fabricating inkjet printhead with projections... Method of fabricating inkjet printhead with projections...

2008-11-11

2010-11-30

Banks, Derris H (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S832000, C029S846000, C029S849000, C216S027000, C347S047000

Reexamination Certificate

active

07841086

ABSTRACT:
A method of fabricating an inkjet printhead. The method includes the steps of: (a) forming a plurality of MEMS ink ejection assemblies on an ink-ejection surface of a silicon substrate, each ink ejection assembly being sealed with roof material spanning across the ink ejection assemblies to define a nozzle plate; (b) etching partially into the roof material to form simultaneously a respective nozzle rim for each ink ejection assembly and a plurality of projections patterned across the nozzle plate between nozzle rims; and (c) etching through the roof material to form a respective nozzle aperture for each ink ejection assembly. The projections patterned across the nozzle plate between nozzle rims are useful for reducing stiction between particulates and the nozzle plate.

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