Method of fabricating inkjet nozzle comprising suspended...

Details Method of fabricating inkjet nozzle comprising suspended... Method of fabricating inkjet nozzle comprising suspended...

2007-08-07

2007-08-07

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Forming or treating thermal ink jet article

Reexamination Certificate

active

11080497

ABSTRACT:
A method of fabricating inkjet nozzles on a substrate is provided. Each nozzle comprises a nozzle chamber and an actuator suspended in the nozzle chamber. Each nozzle chamber comprises a roof having a nozzle aperture defined therein and sidewalls extending from the roof to the substrate. The method comprising the steps of: (a) depositing a layer of first sacrificial photoresist onto the substrate; (b) defining actuator scaffolds in the first sacrificial photoresist; (c) depositing actuator material onto the actuator scaffolds; (d) etching the actuator material to define actuators; (e) depositing a layer of second sacrificial photoresist onto the actuators, the first sacrificial photoresist and/or the substrate; (f) defining openings in the second sacrificial photoresist, the openings being complementary to chamber sidewalls; (g) depositing roof material onto the second sacrificial photoresist and into the openings, thereby forming the roof and sidewalls of each chamber; (h) etching nozzle apertures through each roof; and (i) removing the first and second sacrificial photoresist exposed through the nozzle apertures.

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The Fabrication and Reliability Testing of Ti/TiN Heaters; P De Moor, A Witvrouw, V Simons, I De Wolf; IMEC Kapeldreef 75, B3001 Leuven, Belgium*.

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