Method of fabricating inkjet nozzle chambers having filter...

Metal working – Method of mechanical manufacture – Fluid pattern dispersing device making – e.g. – ink jet

Reexamination Certificate

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C029S832000, C029S834000, C029S835000, C029S845000, C216S027000

Reexamination Certificate

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07464466

ABSTRACT:
A method of fabricating a plurality of inkjet nozzles on a substrate. The method comprises the steps of: (a) providing a substrate having a plurality of trenches corresponding to ink inlets; (b) depositing sacrificial material so as fill the trenches and form a scaffold on the substrate; (c) defining openings in the sacrificial material; (d) depositing roof material over the sacrificial material to form nozzle chambers and filter structures simultaneously; (e) etching nozzle apertures through the roof material; and (f) removing the sacrificial material.

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patent: 2003/0146464 (2003-08-01), Prophet
patent: 2004/0100532 (2004-05-01), Silverbrook

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