Method of fabricating ink jet print head

Metal working – Piezoelectric device making

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Details

298901, 3461401, 427100, H01L 4122

Patent

active

055600905

ABSTRACT:
A method of fabricating an ink jet print head which jets ink through an ink jet nozzle by pressurizing the ink supplied to a pressure chamber from an ink supplying portion, including applying flowable resin on a surface of a piezoelectric member polarized along a thickness thereof; forming a low rigidity member having a rigidity less than that of the piezoelectric member by curing the resin; grinding a surface of the low rigidity member; forming a plurality of grooves extending from the surface of the low rigidity member to an inside of the piezoelectric member; forming electrodes on the entire inner surface of the grooves; and sticking a top plate on the ground surface to close an opening of the grooves, thereby forming a plurality of pressure chambers communicating with an ink supplying portion and the ink jet nozzle. Since the low rigidity member is cured before it is ground, the proportion of the height of the low rigidity member and the piezoelectric member is equalized. As a result the jetting characteristics are improved.

REFERENCES:
patent: 5193256 (1993-03-01), Ochiai

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