Method of fabricating imaging apparatus

Details Method of fabricating imaging apparatus Method of fabricating imaging apparatus

1991-08-30

1992-07-21

Schilling, Richard L.

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

356401, 355 77, 430321, 430394, G03F 900

Patent

active

051321955

ABSTRACT:
In a method for fabricating imaging apparatus, adjoining regions, each forming only part of the active area of the complete device, are laid down separately, enabling larger active areas to be produced than would otherwise be possible using conventional wafer stepper equipment. In the complete device, imaging may be arranged over the boundary between the regions and/or charge may be transferred across the boundary.

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IBM Technical Disclosure Bulletin, "Mask for Producing a Pattern of Fiducial Points on Semiconductor Wafers", J. F. Wuestenhagen, vol. 16, No. 7, Dec. 1973, pp. 2306-2307.
Optical Engineering, "Large Format, High Resolution Image Sensors", M. M. Blouke et al, Sep., 1987, vol. 26, No. 9, pp. 837-843.

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