Method of fabricating halftone phase shift mask

Details Method of fabricating halftone phase shift mask Method of fabricating halftone phase shift mask

2011-04-26

2011-04-26

Rosasco, Stephen (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S322000

Reexamination Certificate

active

07932001

ABSTRACT:
A method of fabricating a halftone phase shift mask, comprising: forming a structure by sequentially stacking a light blocking layer pattern defining a side surface and a phase shift layer pattern over a light transmitting substrate; and treating the structure with heat to make the phase shift layer pattern flow and cover the side surface of the light blocking layer pattern.

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patent: 10-2007-0100572 (2007-10-01), None

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