Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2007-01-24
2010-11-23
Rosasco, Stephen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S321000
Reexamination Certificate
active
07838174
ABSTRACT:
A method of fabricating a grayscale mask includes preparing a silicon wafer; depositing a layer of Si3N4directly on the silicon wafer; implanting H+ions into the silicon wafer to form a defect layer; depositing a first layer of SiOxNydirectly on the Si3N4layer; depositing a layer of SRO directly on the first layer of SiOxNy; patterning and etching the SRO layer to form a microlens array in the SRO layer; depositing a second layer of SiOxNyon the SRO microlens array; CMP to planarize the second layer of SiOxNy; bonding and cleaving the planarized SiOxNyto a quartz plate to form a graymask reticle; etching to remove silicon from the bonded structure; etching to remove SiOxNyand Si3N4from the bonded structure; and cleaning and drying the graymask reticle.
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Droes Steven R.
Gao Wei
Ono Yoshi
Ulrich Bruce D.
Fraser Stewart A
Law Office of Gerald Maliszewski
Maliszewski Gerald
Rosasco Stephen
Sharp Laboratories of America Inc.
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