Method of fabricating emitter/detector-in-a-well for the integra

Details Method of fabricating emitter/detector-in-a-well for the integra Method of fabricating emitter/detector-in-a-well for the integra

1983-06-27

1985-08-06

Andrews, Melvyn J.

Metal working

Plural diverse manufacturing apparatus including means for...

Common reciprocating support for spaced tools

29572, 29576E, 29580, 148171, 148175, 148 DIG.50, 148DIG72, 357 16, 357 17, 357 30, H01L 2120, H01L 21208

Patent

active

045326940

ABSTRACT:
Integration of optoelectronic component and electronic components in a planar surface of a semi-insulating substrate such as gallium arsenide. A depression is etched into the planar surface to contain the transverse junction stripe laser structure which is grown by epitaxial layers. In the resulting structure the surface of the epitaxial layers forms a portion of the planar surface, thus placing the electrical and optical elements on or at the planar surface to facilitate fabrication and testing.

REFERENCES:
patent: 3978428 (1976-08-01), Burnham et al.
Tsang et al., Applied Physics Letters vol. 30, pp. 293-296, 1977.

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