Method of fabricating element having microstructure

Details Method of fabricating element having microstructure Method of fabricating element having microstructure

2004-10-19

2008-12-09

Halpern, Mark (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

With severing, removing material from preform mechanically,...

Dividing work to form plural articles

C205S067000, C205S070000

Reexamination Certificate

active

07462312

ABSTRACT:
A method of fabricating an element having a microstructure such as an MEMS device uses a material whose state changes with a temperature change. A sheet-like member having a microstructure on its surface is fixed to a vacuum chuck by an adhesive sheet and the material whose state changes with a temperature change is applied to the surface of the sheet-like member the material is then cooled to solidify it on the surface of the sheet-like member and the sheet-like member is cut10into a plurality of elements, while the material is in the solidified state, and the separated elements are then removed from the adhesive sheet.

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