Method of fabricating diffraction grating masters and apparatus

Details Method of fabricating diffraction grating masters and apparatus Method of fabricating diffraction grating masters and apparatus

1975-09-08

1977-08-30

Jones, Jr., James L.

Metal fusion bonding

Process

Combined

96 27H, 96 383, 264 1, 350162SF, 29458, G02B 2738, B23P 324

Patent

active

040449394

ABSTRACT:
A method of producing a diffraction grating master which comprises exposing a plurality of reduced first grating patterns on a light sensitive layer in conformance with a predetermined code; processing the light sensitive layer to produce first gratings therein; exposing a plurality of reduced second grating patterns on the light sensitive layer (superimposed on the first gratings) and repeating the processing step to produce the second gratings; vacuum depositing a layer of silver on the superimposed first and second gratings; electroplating a layer of nickel on the silver layer on the superimposed gratings; separating the resulting nickel-silver layer from the light sensitive layer; and reinforcing the nickel-silver layer (formed in the pattern of the first and second gratings) for use as an embossing master. A special electroplating fixture used in the electroplating step insures that the nickel layer being deposited lies flat without "peeling".

REFERENCES:
patent: 2444314 (1948-06-01), Ruggieri
patent: 2875543 (1959-03-01), Sylvester et al.
patent: 3045531 (1962-07-01), Prescott
patent: 3388735 (1968-06-01), Sayce
patent: 3484154 (1969-12-01), Swing et al.
patent: 3619024 (1971-11-01), Frattarola
patent: 3917378 (1975-11-01), Gale

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