Coherent light generators – Particular active media – Semiconductor
Patent
1998-04-29
2000-03-07
Bovernick, Rodney
Coherent light generators
Particular active media
Semiconductor
372 45, 385 43, 385131, H01S 319, G02B 610, G02B 626
Patent
active
060349832
ABSTRACT:
A fabricating method of compound semiconductor device is proposed which has a step of varying selective growth ratio of crystal by changing either a mean free path of material gas in gas atmosphere for use in crystal growth or a thickness of a stagnant layer of the material gas, using selective growth mask having opening portion consisting of first region having a narrow width and second region having a wide width.
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Ekawa Mitsuru
Fujii Takuya
Kobayashi Hirohiko
Yamamoto Tsuyoshi
Bovernick Rodney
Fujitsu Limited
Leung Quyen P.
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