Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-07-31
2010-06-29
Lindsay, Jr., Walter L (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S065000, C257SE33001
Reexamination Certificate
active
07745251
ABSTRACT:
A method of manufacturing a complimentary metal oxide semiconductor (CMOS) image sensor. The method includes a step of performing a silicide process relative to a plug for transferring electrons generated from a photodiode. The silicide of the plug blocks light irradiated through the plug, so that the performance of the image sensor may be optimized.
REFERENCES:
patent: 6040593 (2000-03-01), Park
patent: 2006/0138494 (2006-06-01), Lee
Dongbu HiTeck Co., Ltd.
Lindsay, Jr. Walter L
Sherr & Vaughn, PLLC
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