Method of fabricating CMOS-compatible non-volatile memory...

Static information storage and retrieval – Floating gate – Particular biasing

Reexamination Certificate

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C438S524000, C438S160000

Reexamination Certificate

active

07839693

ABSTRACT:
An electrically erasable programmable read-only memory (“CMOS NON-VOLATILE MEMORY”) cell is fabricated using standard CMOS fabrication processes. First and second polysilicon gates are patterned over an active area of the cell between source and drain regions. Thermal oxide is grown on the polysilicon gates to provide an isolating layer. Silicon nitride is deposited between the first and second polysilicon gates to form a lateral programming layer.

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patent: 7154779 (2006-12-01), Mokhlesi et al.
patent: 7294888 (2007-11-01), Paak et al.
patent: 2002/0196665 (2002-12-01), Kim
patent: 2004/0079988 (2004-04-01), Harari
patent: 2004/0120175 (2004-06-01), Schrom et al.
U.S. Appl. No. 11/974,361, filed Oct. 12, 2007, Paak et al.

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