Method of fabricating antifuses in an integrated circuit device

Fishing – trapping – and vermin destroying

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437 60, 437922, 257530, H01L 2170, H01L 2700

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055277454

ABSTRACT:
Various improvements in the fabrication of an antifuse having silicon-amorphous silicon-metal layer structure are presented. Included are improved deposition techniques for the amorphous silicon layer. The improvements include steps for the fabrication of such an antifuse without the use of platinum and the resulting antifuse and contact structures.

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