Method of fabricating and patterning OLEDs

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal

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438 23, 438 34, 438 35, 438 99, 257 40, 257 79, 257 88, H01L 2912

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active

060135387

ABSTRACT:
A multiple layer patterning system with an undercut allows the deposition of a material onto a substrate from a direction substantially perpendicular to the substrate, followed by the angular deposition of a protective cap. Because of the angular deposition, the protective cap extends into the undercut and completely covers and surrounds any previously exposed surface of the material. The material is thereby protected from subsequent exposure to substances that may be deleterious.

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