Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Patent
1997-11-24
2000-01-11
Bowers, Charles
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
438 23, 438 34, 438 35, 438 99, 257 40, 257 79, 257 88, H01L 2912
Patent
active
060135387
ABSTRACT:
A multiple layer patterning system with an undercut allows the deposition of a material onto a substrate from a direction substantially perpendicular to the substrate, followed by the angular deposition of a protective cap. Because of the angular deposition, the protective cap extends into the undercut and completely covers and surrounds any previously exposed surface of the material. The material is thereby protected from subsequent exposure to substances that may be deleterious.
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Burrows Paul
Forrest Stephen R.
Tian Peifang
Bowers Charles
Christianson Keith
The Trustees of Princeton University
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