Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1989-02-24
1992-01-21
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427255, 4272552, 430 5, C23C 1632, G03F 900
Patent
active
050826956
ABSTRACT:
A method of fabricating an X-ray exposure mask including the steps of forming a .beta.-SiC membrane by chemcial vapor deposition and simultaneously doping the membrane with at least one of phosphorous, boron, nitrogen and oxygen.
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Arnold W. Yanof, "Electron-Beam, X-ray, and Ion-Beam Technology: Submicrometer Lithographies VII," pp. 10-15, Santa Clara, Calif., Mar. 2-4, 1988.
Patent Abstracts of Japan, vol. 12, No. 77, Mar. 10, 1988.
Eshita Takashi
Furumura Yuji
Mieno Fumitake
Nakagawa Kenji
Nakaishi Masafumi
501 Fujitsu Limited
Beck Shrive
Burke Margaret
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