Method of fabricating an ultra-small condenser microphone

Details Method of fabricating an ultra-small condenser microphone Method of fabricating an ultra-small condenser microphone

2011-05-17

2011-05-17

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S825000, C381S150000, C381S369000

Reexamination Certificate

active

07941909

ABSTRACT:
In the present invention, a plurality of condenser microphones is formed on a substrate. Then, charges are fixed to a dielectric film provided in each of the condenser microphones. After an amount of deposited charges of the dielectric film of each of the plurality of the condenser microphones is inspected by measuring capacitance of each condenser microphone while applying bias between the first electrode film thereof and the second electrode film thereof, the substrate is diced so that each of the condenser microphones is separated. Thus, at least the step of fixing charges is performed in a substrate state where the plurality of the condenser microphones is formed on the substrate. Therefore, the present invention contributes to enhancement of productivity in an assembly process of the condenser microphone and reduction in equipment costs.

REFERENCES:
patent: 7080442 (2006-07-01), Kawamura et al.
patent: 2007/0274544 (2007-11-01), Takeuchi et al.
patent: 2007-294858 (2007-11-01), None
patent: 2008-112755 (2008-05-01), None

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