Method of fabricating an SOS island edge passivation structure

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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29571, 29578, 29580, 148187, 156653, 156657, 1566591, 156662, 357 4, 357 23, 357 49, 357 54, 357 56, H01L 2186, H01L 2120

Patent

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042421560

ABSTRACT:
A silicon-on-sapphire semiconductor structure, and method of fabricating such structure, in which a silicon nitride layer is provided over the oxide layer. The silicon nitride layer is disposed over the upper edge of the silicon island, and acts to prevent gate oxide breakdown.

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patent: 4002501 (1977-01-01), Tamura
patent: 4015279 (1977-03-01), Ham
patent: 4054895 (1977-10-01), Ham
patent: 4057824 (1977-11-01), Woods
patent: 4072974 (1978-02-01), Ipri
patent: 4097314 (1978-06-01), Schlesier et al.
patent: 4174217 (1979-11-01), Flatley

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