Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2006-06-27
2006-06-27
Chen, Bret (Department: 1762)
Coating processes
With post-treatment of coating or coating material
Heating or drying
C427S376200, C427S378000, C427S126300, C427S255270, C438S787000
Reexamination Certificate
active
07067176
ABSTRACT:
Silicon carbide structures are fabricated by fabricating a nitrided oxide layer on a layer of silicon carbide and annealing the nitrided oxide layer in an environment containing hydrogen. Such a fabrication of the nitrided oxide layer may be provided by forming the oxide layer in at least one of nitric oxide and nitrous oxide and/or annealing an oxide layer in at least one of nitric oxide and nitrous oxide. Alternatively, the nitrided oxide layer may be provided by fabricating an oxide layer and fabricating a nitride layer on the oxide layer so as to provide the nitrided oxide layer on which the nitride layer is fabricated. Furthermore, annealing the oxide layer may be provided as a separate step and/or substantially concurrently with another step such as fabricating the nitride layer or performing a contact anneal. The hydrogen environment may be pure hydrogen, hydrogen combined with other gases and/or result from a hydrogen precursor. Anneal temperatures of 400° C. or greater are preferred.
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Das Mrinal Kanti
Lipkin Lori A.
Chen Bret
Cree Inc.
Myers Bigel Sibley & Sajovec P.A.
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