Method of fabricating an ink jet print head

Details Method of fabricating an ink jet print head Method of fabricating an ink jet print head

1994-01-26

1996-01-23

Vo, Peter

Metal working

Piezoelectric device making

298901, H01L 4122, B41J 201

Patent

active

054856639

ABSTRACT:
An ink jet print head comprises a piezoelectric plate (2) formed of a piezoelectric material, a base plate (1) formed of a nonconductive, nonelectrostrictive material having rigidity lower than that of the piezoelectric material and joined to the piezoelectric plate (2), electrodes (8) formed by depositing a metal by electroless plating over the entire bottom surfaces of a plurality of parallel grooves (3) formed through the piezoelectric plate (2) into the base plate (1) and the entire side surfaces of side walls (4) each consisting of an upper side wall (4a) formed in the piezoelectric plate (2) and lower side wall (4b) formed in the base plate (2) between the grooves (3), a top plate (10) joined to the upper surface of the piezoelectric plate (2) so as to close the upper open ends of the grooves (3) to form pressure chambers (14), and a nozzle plate (12) provided with ink jets (11) and joined to one end of the assembly of the base plate (1), the piezoelectric plate (2) and the top plate (10) so that the ink jets (11) correspond respectively to the pressure chambers (14).

REFERENCES:
patent: 5003679 (1991-04-01), Bartky et al.
patent: 5193256 (1993-03-01), Ochiai et al.
patent: 5365645 (1994-11-01), Walker et al.
Lane et al "Making Multi-Ink Jet Nozzles" IBM Technical Disclosure Bulletin, vol. 17, No. 5, Oct. 1974, p. 1523.

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