Method of fabricating an imaging X-ray spectrometer

Details Method of fabricating an imaging X-ray spectrometer Method of fabricating an imaging X-ray spectrometer

1985-06-18

1986-10-21

Ozaki, George T.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148188, 148189, 148190, 29580, 29591, H01L 21383, H01L 21385

Patent

active

046183809

ABSTRACT:
A process for fabricating an X-ray spectrometer having imaging and energy resolution of X-ray sources. The spectrometer has an array of adjoining rectangularly shaped detector cells formed in a silicon body. The walls of the cells are created by laser drilling holes completely through the silicon body and diffusing n.sup.+ phosphorous doping material therethrough. A thermally migrated aluminum electrode is formed centrally through each of the cells.

REFERENCES:
patent: 3801884 (1984-04-01), Sequin
patent: 3936645 (1976-02-01), Iversen
patent: 3958264 (1976-05-01), Magdo
patent: 4250385 (1981-02-01), Luderer et al.
patent: 4377817 (1983-03-01), Nishizawa et al.
patent: 4472728 (1984-09-01), Grant et al.
patent: 4589190 (1986-05-01), Anthony

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