Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Patent
1996-04-10
1999-03-30
Gorgos, Kathryn
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating selected area
204164, 205118, 205136, C25D 1102
Patent
active
058883711
ABSTRACT:
An extremely small aperture is formed using a sharp conductive tip. The aperture may be in the form of a transparent window or an open aperture. In a first embodiment, the conductive tip is positioned adjacent a layer of titanium and a voltage is applied to the tip. The intense electric field near the tip anodizes the titanium and creates a small transparent window of titanium dioxide. In a second embodiment, a titanium layer is covered with a layer of silicon, a small region of the silicon is oxidized using a conductive tip, and the silicon and then the titanium are etched. In a third embodiment, an electric field from a conductive tip creates a pit in a surface titanium oxide layer. The titanium is then etched, using the oxide layer as a mask, to form an open aperture. The conductive tip is preferably the tip of an atomic force microscope. This process is useful in constructing any instrument, such as a near field optical scanning microscope or a scanning ion conductance microscope, which requires an extremely small, precise aperture.
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Hiroyuki Sugimura et al., "Scanning Probe Anodization: Nanolithography Using Thin Films of Anodically Oxidizable Materials as Resist", Tsukuba Research Laboratory, Nikon Co., 5-9-1 Tokodai, Tsukuba 300-26, Japan. No dates available.
Hiroyuki Sugimura et al., "Tip-Induced Anodization of Titanium Surfaces by Scanning Tunneling Microscopy: A Humidity Effect on Nanolithography", vol. 63, 30 Aug. 1993, No. 9., Appl. Phys. Lett. 63 (9), pp. 1288-1290.
"Scanning Tunneling Microscope Tip-Induced Anodization for Nanofabrication of Titanium", J. Phys. Chem., vol. 98, pp. 4352-4357, Jan. 9, 1994, and Sugimura et al., Appl. Phys. Lett. 63(9), 30 Aug. 1993.
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Gorgos Kathryn
Leader William T.
Steuber David E.
The Board of Trustees of the Leland Stanford Jr. University
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