Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2007-07-03
2007-07-03
Alanko, Anita (Department: 1765)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S041000, C216S049000, C216S059000, C216S067000, C216S088000, C029S603030, C029S603120, C204S192340
Reexamination Certificate
active
10909224
ABSTRACT:
A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
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He Li
Hu Yining
Zhao Ming
Alanko Anita
Carr & Ferrell LLP
Harrison, Esq. Joshua C.
Western Digital (Fremont) Inc.
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