Method of fabricating a two-color detector using LPE crystal gro

Fishing – trapping – and vermin destroying

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437 2, 437 3, 437126, 437130, 437965, 437974, 2503381, 25033901, 250345, 250372, 257440, 257442, H01L 3118

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active

053806697

ABSTRACT:
Disclosed is a method of fabricating a two-color radiation detector, and two-color photodetectors fabricated by the method. A structure is grown upon a substrate (10) to provide, in sequence, a LPE grown LWIR n-type layer (12), a MWIR p+ type common contact layer (14), and a MWIR n-type layer (16). Following growth of the MWIR n-type layer, a layer of passivation (18) is applied, and the substrate is removed to so as to enable further processing of the structure into an array (1) of two-color photodetectors. The three layer structure is bonded, prior to further processing, to a supporting substrate (22) with an adhesive bond made to the passivation layer. The supporting substrate is comprised of IR transparent material such as Group IIB-VIA semiconductor material, Group IIIA-VA semiconductor material, Group IVA semiconductor material, sapphire, and combinations thereof. The supporting substrate may be subsequently removed after hybridizing a photodetector array (2) with readout electronics to provide a thinned detector array having a reduced cool-down time.

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J. M. Pawlikowski and P. Becla, "Some Properties of Photovoltaic Cd.sub.x Hg.sub.1-x Te Detectors for Infrared Radiation", Infrared Physics, vol. 15, (1975) pp. 331-337.
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