Method of fabricating a trench structure

Details Method of fabricating a trench structure Method of fabricating a trench structure

1991-09-27

1992-05-12

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 61, 437 62, 437 63, 437 72, 437968, H01L 2176, H01L 21302

Patent

active

051127725

ABSTRACT:
A method of fabricating a trench structure includes providing a substrate having a first layer disposed on a surface thereof and a second layer disposed on the first layer. A trench is formed through the first and second layers and into the substrate. A dielectric liner is formed on the sidewalls of the trench which is then filled with a trench fill material. Portions of the trench liner disposed above the trench fill material are removed and a conformal layer is then formed on the trench structure. The conformal layer and a portion of the trench fill material are then oxidized.

REFERENCES:
patent: 4509249 (1985-04-01), Goto et al.
patent: 4994406 (1991-02-01), Vasquez et al.
patent: 5061653 (1991-10-01), Teng

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