Method of fabricating a solid-state angular rate sensor

Details Method of fabricating a solid-state angular rate sensor Method of fabricating a solid-state angular rate sensor

2006-11-14

2006-11-14

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S831000, C029S842000, C029S846000, C310S369000

Reexamination Certificate

active

07134171

ABSTRACT:
A solid state angular rate sensor is fabricated by preparation of a disc-shaped base structure (10) having first and second outer layers of a piezo-electric ceramic material, built up from a number of layers of a ceramic sheet or film that is capable of being tape-cast. The layers are then sintered and an inner layer of metallic material is provided between the outer layers, to complete a piezo-electric base structure having an inner electrode (15) between the sintered outer layers. Arrays of electrode structures are provided on the outer layers of the base structure (10), the electrodes radiating from the central region14of the base structure (10) and being equi-spaced around the outer edge of the disc (19).

REFERENCES:
patent: 4655081 (1987-04-01), Burdess
patent: 5117148 (1992-05-01), Nakamura et al.
patent: 5495760 (1996-03-01), Wirt
patent: 6049160 (2000-04-01), Safari et al.

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