Method of fabricating a sensor

Details Method of fabricating a sensor Method of fabricating a sensor

1996-02-29

1998-10-20

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

438 52, H01L 2100

Patent

active

058245650

ABSTRACT:
A method of fabricating a sensor (100) includes providing a substrate (200), providing a stationary comb structure (117, 118) overlying the substrate (200), providing a movable seismic mass (101) overlying the substrate (200) and movable relative to the substrate (200) and the stationary comb structure (117, 118), and providing a dielectric layer (500, 800) between the stationary comb structure (117, 118) and the movable seismic mass (101). The dielectric layer (500) increases the sensitivity of the sensor (100) and also prevents the movable seismic mass (101) from shorting together with the stationary comb structure (117, 118).

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Analog Devices, "Monolithic Accelerometer with Signal Conditioning", Feb. 16, 1993, pp. 1-11.

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