Method of fabricating a semiconductor device with high heat cond

Fishing – trapping – and vermin destroying

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148DIG95, H01L 2120

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active

055389198

ABSTRACT:
A VCSEL having a first mirror stack positioned on the surface of a substrate, an active region positioned on the first mirror stack and substantially coextensive therewith, and a second mirror stack positioned on the active region, the second mirror stack forming a ridge or mesa having a side surface. A metal contact layer is positioned on the side surface of the ridge or mesa and on portions of an end of the ridge or mesa to define a light emitting area, and a layer of diamond-like material is electrolytically plated on the metal contact layer so as to form a heat conductor to remove heat from the laser.

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K. D. Choquette et al., "Vertical-Cavity Surface-Emitting Lasers Fabricated by Vacuum Integrated Processing," IEEE Photonics Technology Letters, vol. 4, No. 9, (Sep. 1992), p. 951-954.

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