Method of fabricating a programmable device including a protecti

Details Method of fabricating a programmable device including a protecti Method of fabricating a programmable device including a protecti

1991-12-19

1993-09-21

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 48, 437170, 437235, 437922, H01L 2170, H01L 2700

Patent

active

052468739

ABSTRACT:
A programmable device to which information can be electrically written to, and can store the information, even after power is cut off is disclosed. The programmable device has a lower electrode, an insulating layer formed on the lower electrode, and an upper electrode formed on the insulating layer. The insulating layer has two window regions having a thickness thinner than a region surrounding the window regions. The upper electrode is formed in such a way as to bridge between the two adjacent window regions. The size of programmable regions where the upper electrode overlaps the window regions is made smaller than the minimum feature size defined by resolution of lithography. Further, the total area of the two program regions remains unchanged despite misalignment of masks during the lithography process.

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patent: 4943538 (1990-07-01), Mohsen et al.
patent: 5019532 (1991-05-01), Kaya

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