Method of fabricating a probe having a field effect...

Details Method of fabricating a probe having a field effect... Method of fabricating a probe having a field effect...

2008-07-22

2008-07-22

Vanore, David A. (Department: 2881)

Nanotechnology

Manufacture, treatment, or detection of nanostructure

With scanning probe

C977S876000, C977S849000, C977S850000, C977S855000, C977S860000, C977S861000, C977S862000, C977S863000, C977S864000, C250S306000, C250S310000, C438S056000, C438S083000, C438S100000, C438S142000, C257S213000, C423S414000, C423S44500R

Reexamination Certificate

active

11317603

ABSTRACT:
A probe of a scanning probe microscope having a sharp tip and an increased electric characteristic by fabricating a planar type of field effect transistor and manufacturing a conductive carbon nanotube on the planar type field effect transistor. To achieve this, the present invention provides a method for fabricating a probe having a field effect transistor channel structure including fabricating a field effect transistor, making preparations for growing a carbon nanotube at a top portion of a gate electrode of the field effect transistor, and generating the carbon nanotube at the top portion of the gate electrode of the field effect transistor.

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