Method of fabricating a probe card

Details Method of fabricating a probe card Method of fabricating a probe card

2011-07-12

2011-07-12

Nguyen, Donghai D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S842000, C029S847000, C439S083000

Reexamination Certificate

active

07975380

ABSTRACT:
Provided is a probe card and method of fabricating the same. This method comprises forming soldering bumpers electrically connected to conductive patterns on a substrate, forming probes connected to the conductive patterns and supported by the soldering bumpers, and then melting the soldering bumpers to fixing the probes to the substrate. Forming the soldering bumpers includes a step of forming the soldering bumpers in the same pattern and size by means of a photolithography process.

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patent: WO0215260 (2002-02-01), None

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