Method of fabricating a pressure sensor

Glass manufacturing – Processes – Fusion bonding of glass to a formed part

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65 58, 65 5921, 65 5923, 73718, 73724, 361283, C03B 2320

Patent

active

043404090

ABSTRACT:
A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.
The method of making the quartz capacitive pressure capsule includes the steps of surface preparation, preglazing of the component parts and vacuum sealing by utilizing a controlled pressure-temperature profile.
A registration fixture is described which contains a plurality of flat plates, each plate having a pressure capsule receiving cavity sized to closely receive one of the quartz plates and further provides a uniform temperature radiation pattern for sealing of the pressure capsule during the controlled pressure-temperature profile.

REFERENCES:
patent: 2279854 (1942-04-01), Whitney
patent: 3239323 (1966-03-01), Folweller
patent: 3687650 (1972-08-01), Case et al.
patent: 3805368 (1974-04-01), Eberhard et al.
patent: 4177496 (1979-12-01), Bell et al.
patent: 4184189 (1980-01-01), Davis et al.
patent: 4287553 (1981-09-01), Braunlich

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