Method of fabricating a piezoelectric/electrostrictive actuator

Coating processes – Electrical product produced – Piezoelectric properties

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4271763, 310323, 310363, 29 2535, B05D 512

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056310404

ABSTRACT:
A piezoelectric/electrostrictive actuator comprising a substrate, a plurality of electrodes in the form of strips formed on at least one surface of the substrate such that the electrode strips are spaced from each other in a direction parallel to the substrate surface, and a piezoelectric/electrostrictive portion which is disposed between the adjacent strips of the electrodes in the spacing direction, and in contact with the adjacent electrode strips, so that the piezoelectric/electrostrictive portion produces a flexural displacement or force due to at least the longitudinal mode of converse piezoelectric or electrostrictive effect upon application of a voltage between the adjacent electrode strips.

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Japanese Journal of Applied Physics, vol. 28 (1989(Supplement 28-2, pp. 77-79; Kawamura, Yukinori et al., "Microstructure and Piezoelectric Properties of PZT Based Cermics".
"Ceramic Grain Size and Electric-Field Induced Strain", pp. 40-43, Fundamentals and Applications of Piezoelectric/Electrostrictive Actuators, Kenji Uchino, 1st Edition, 2nd Print, Dec. 20, 1986, Morikita Publishing Co., Tokyo.

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