Method of fabricating a piezoelectric/electrostrictive actuator

Details Method of fabricating a piezoelectric/electrostrictive actuator Method of fabricating a piezoelectric/electrostrictive actuator

1995-05-26

1997-04-22

Hall, Carl E.

Coating processes

Electrical product produced

Piezoelectric properties

29 2535, 264 61, H01L 4122

Patent

active

056227485

ABSTRACT:
A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.

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