Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent
1997-05-27
1999-04-20
Chaudhari, Chandra
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
438 57, 438 88, H01L 21469
Patent
active
058952276
ABSTRACT:
A method of fabricating a photo-device includes the steps of forming an optically nontransparent, electrically conductive layer on the surface of a photoelectric conversion substrate, and transferring a portion of the optically nontransparent, electrically conductive layer using a scanning probe process apparatus to form, over an optical window, a light-permeable protective insulation structure of a region of the optical window on the substrate surface beneath the light-permeable protective insulation structure.
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U. Prank et al. "Metal-Semiconductor-metal Photodetector with Integrated Fabry-Perot Resonator for Wavelength Demultiplexing High Bandwidth Receivers"; Applied Physics Letters; vol. 62, No. 2, Jan. 11, 1993; pp. 129-130, XP000332226.
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Ishii Masami
Itatani Taro
Matsumoto Kazuhiko
Nakagawa Tadashi
Sugiyama Yoshinobu
Agency of Industrial Science & Technology, Ministry of Internati
Chaudhari Chandra
Christianson Keith
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