Method of fabricating a phase-change memory

Semiconductor device manufacturing: process – Having selenium or tellurium elemental semiconductor component

Reexamination Certificate

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C438S282000, C438S622000, C257S248000, C257S528000

Reexamination Certificate

active

07923286

ABSTRACT:
A phase-change memory comprises a bottom electrode formed on a substrate. A first isolation layer is formed on the bottom electrode. A top electrode is formed on the isolation layer. A first phase-change material is formed in the first isolation layer, wherein the top electrode and the bottom electrode are electrically connected via the first phase-change material. Since the phase-change material can have a diameter less than the resolution limit of the photolithography process, an operating current for a state conversion of the phase-change material pattern may be reduced so as to decrease a power dissipation of the phase-change memory device.

REFERENCES:
patent: 2006/0073662 (2006-04-01), Jang et al.
patent: 2006/0197130 (2006-09-01), Suh et al.

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