Method of fabricating a micromachined tube for fluid flow

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

06935010

ABSTRACT:
Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the free-standing section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement. Different methods of fabricating micromachine fluidic apparatus are also disclosed, including the use of fusion bonding of non-conducting substrates, high-aspect ratio etching techniques, and anisotropic etching and refill techniques, preferably utilizing chevron-shaped slit openings to fabricate microtube sections.

REFERENCES:
patent: 5027499 (1991-07-01), Prohaska
patent: 5435060 (1995-07-01), Hayes et al.
patent: 5568013 (1996-10-01), Then et al.
patent: 5569355 (1996-10-01), Then et al.
patent: 5779837 (1998-07-01), Harvey

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of fabricating a micromachined tube for fluid flow does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating a micromachined tube for fluid flow, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating a micromachined tube for fluid flow will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3470721

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.