Metal working – Method of mechanical manufacture – Fluid pattern dispersing device making – e.g. – ink jet
Reexamination Certificate
2006-01-17
2006-01-17
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Fluid pattern dispersing device making, e.g., ink jet
C029S611000, C029S830000, C029S831000, C029S846000, C216S002000
Reexamination Certificate
active
06986202
ABSTRACT:
A method of fabricating a micro-electromechanical fluid ejection device includes the step of forming a first layer of a sacrificial material on a substrate incorporating a drive circuitry layer. A first electrically conducting layer, a first structural layer and a second electrically conducting layer are formed on the sacrificial material with the first structural layer interposed between the electrically conducting layers. The sacrificial material is formed so that the first electrically conducting layer defines a heating circuit connected to the drive circuitry, and the electrically conducting layers and the first structural layer define a fluid ejecting member connected to an actuator arm that is displaceable on heating and subsequent expansion of the first electrically conducting layer. A second layer of sacrificial material is formed on the second conducting layer layer. A second structural layer is formed on the second layer of sacrificial material. The sacrificial material is formed so that the second structural layer defines a nozzle chamber structure with the fluid ejecting member positioned in the nozzle chamber structure. The sacrificial material is removed so that the nozzle chamber structure defines a nozzle chamber and a fluid ejection port in fluid communication with the nozzle chamber.
REFERENCES:
patent: 4032929 (1977-06-01), Fischbeck et al.
patent: 4210920 (1980-07-01), Burnett et al.
patent: 4460905 (1984-07-01), Thomas
patent: 4576111 (1986-03-01), Slomianny
patent: 4633267 (1986-12-01), Meinhof
patent: 4723131 (1988-02-01), Droit
patent: 4737802 (1988-04-01), Mielke
patent: 5255016 (1993-10-01), Usui et al.
patent: 5798283 (1998-08-01), Montague et al.
patent: 5903380 (1999-05-01), Motamedi et al.
patent: 5982521 (1999-11-01), Bessho et al.
patent: 6180427 (2001-01-01), Silverbrook
patent: 3245283 (1984-06-01), None
patent: 4139731 (1993-06-01), None
patent: 0189794 (1986-08-01), None
patent: 371763 (1990-06-01), None
patent: 0417673 (1991-03-01), None
patent: 0479441 (1992-04-01), None
patent: 0634273 (1995-01-01), None
patent: 0671271 (1995-09-01), None
patent: 2262152 (1993-06-01), None
patent: 1569425 (1997-12-01), None
patent: 359093356 (1984-05-01), None
patent: 03202351 (1989-12-01), None
patent: 9601403 (1997-10-01), None
patent: WO 86/05722 (1986-10-01), None
patent: WO 97/12689 (1997-04-01), None
Abstract JP 2265751 Oct. 30, 1990 App No. 6486202 (Matsushita Electric Ind Co Ltd).
Abstract JP2265752 Oct. 30, 1990 App No. 6486205 (Matsushita Elec Ind Co Ltd).
Abstract JP2150353 Jun. 8, 1990 App No. 63303835 (Nec Home Electron Ltd).
Abstract JP06106725 Apr. 19, 1994 App No. 04274410 (Ricoh Co Ltd).
Abstract JP06134985 May 17, 1994 App No. 04289974 (Ricoh Co Ltd).
Abstract JP06336011 Dec. 6, 1994 App No. 05129167 (Sharp Corp).
Abstract JP03065349 Mar. 20 1991 App No. 01201587 (Matsushita Elec Ind Co Ltd).
Abstract JP05318724 Dec. 3, 1993 App No. 04125268 (Seikosha Co Ltd).
Abstract JP04368851 Dec. 21, 1992 App No. 03144576 (Seiko Epson Corp).
Abstract JP60131254 Jul. 12, 1985 App No. 58240583 (Ricoh Co Ltd).
Abstract JP04129745 Apr. 30, 1992 App No. 02252254 (Seiko Epson Corp).
Abstract JP02219655 Sep. 3, 1990, App No. 01041035 (Sharp Corp).
Abstract JP02273241 Nov. 7, 1990 App No. 01094761 (Ricoh Co Ltd).
Abstract JP04357039 Dec. 10, 1992 App No. 03131219 (Rohm Co Ltd).
Abstract JP02034342 Feb. 5, 1990 App No. 63185095 (Seiko Epson Corp).
Abstract JP2150353 Jun. 8, 1990 App No. 63303835 (Nec Home Electron Ltd).
Abstract JP55059972 vol. 004, No. 102 (M-022) Jul. 22, 1980 (Seiko Epson Corp).
Abstract JP04126255 vol. 016 No. 384 (M-1296) Aug. 17, 1992 (Seiko Epson Corp).
Silverbrook Research Pty Ltd.
Tugbang A. Dexter
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