Semiconductor device manufacturing: process – Manufacture of electrical device controlled printhead
Reexamination Certificate
2006-02-14
2006-02-14
Lee, Hsien-Ming (Department: 2823)
Semiconductor device manufacturing: process
Manufacture of electrical device controlled printhead
C438S051000, C438S106000, C438S199000, C347S044000, C347S047000, C347S054000
Reexamination Certificate
active
06998278
ABSTRACT:
A method of fabricating a micro-electromechanical actuator includes the step of forming register, gate and drive transistor circuitry on a substrate such that a number of laterally extending traces define at least part of the drive transistor circuitry. A layer of sacrificial material is formed on the register, gate and drive transistor circuitry such that the configuration of the laterally extending traces is imparted to the sacrificial material. A heater layer of an actuator arm is formed on the layer of sacrificial material such that the heater layer defines a heating circuit and has a series of lateral corrugations as a result of the surface configuration of the sacrificial layer. A mechanical layer of the actuator arm is formed on the heater layer and the layer of sacrificial material is removed.
REFERENCES:
patent: 4791435 (1988-12-01), Smith et al.
patent: 5109234 (1992-04-01), Otis et al.
patent: 5126768 (1992-06-01), Nozawa et al.
patent: 5479197 (1995-12-01), Kobayashi et al.
patent: 5790151 (1998-08-01), Mills
patent: 5825383 (1998-10-01), Abe et al.
patent: 6022099 (2000-02-01), Chwalek et al.
patent: 6106089 (2000-08-01), Wen et al.
patent: 6154229 (2000-11-01), Corrigan
patent: 6217155 (2001-04-01), Silverbrook
patent: 6260953 (2001-07-01), Silverbrook
patent: 6273544 (2001-08-01), Silverbrook
patent: 6294420 (2001-09-01), Tsu et al.
patent: 6382756 (2002-05-01), Komuro
patent: 6634735 (2003-10-01), Silverbrook
patent: 0539804 (1993-03-01), None
patent: 0764977 (1997-03-01), None
patent: 829360 (1998-03-01), None
patent: 0865922 (1998-09-01), None
patent: 867294 (1998-09-01), None
patent: 2086807 (1982-05-01), None
patent: 2333065 (1999-07-01), None
patent: WO 96/32808 (1996-10-01), None
LandOfFree
Method of fabricating a micro-electromechanical actuator... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of fabricating a micro-electromechanical actuator..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating a micro-electromechanical actuator... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3627365