Method of fabricating a micro device

Details Method of fabricating a micro device Method of fabricating a micro device

2007-01-09

2007-01-09

Lopez, Carlos (Department: 1731)

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

Introducing material under pressure into mold

C264S656000, C264S670000

Reexamination Certificate

active

10270519

ABSTRACT:
The present invention relates to a method of fabricating a micro device, comprising the steps of pressing an upper mold formed with a plurality of recesses for molding a plurality of rods and a lower mold formed with a seat recess for molding a plate supporting the plurality of rods against each other; injecting ceramic material mixed with a polymer into the mold; releasing a resultant ceramic molding mixed with the polymer from the molds; removing the polymer from the ceramic molding by burning out or melting away the polymer; sintering the ceramic molding; filling a polymer into spaces between the plurality of rods of the sintered ceramic molding so that the top surfaces of the plurality of rods are exposed to the outside; and removing the plate through a polishing process so that bottom surfaces of the plurality of rods are exposed to the outside.

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