Coating processes – Optical element produced
Patent
1998-10-28
2000-09-26
Dudash, Diana
Coating processes
Optical element produced
4271631, 427259, 427266, 427271, 427272, 427282, 427287, 359290, 359291, 359293, 359230, 353 99, B05D 506, G02B 2600, G03B 2128
Patent
active
061239852
ABSTRACT:
A membrane-actuated charge controlled mirror (CCM) that exhibits increased deflection range, reduced beam current and improved electrostatic stability is fabricated using a combination of flat panel manufacturing along with traditional MEMS techniques. More specifically, a unique combination of five masking layers is used to fabricate a number of CCMs on a large glass panel. At the completion of the MEMS processing, the glass panel is diced into individual CCMs. Thereafter, the polymer mirror and membrane release layers are simultaneously released through vent holes in the membrane to leave the free-standing CCM.
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Hackett Leroy H.
Reif Philip G.
Robinson William P.
Dudash Diana
Solus Micro Technologies, Inc.
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