Method of fabricating a high-frequency piezoelectric resonator

Details Method of fabricating a high-frequency piezoelectric resonator Method of fabricating a high-frequency piezoelectric resonator

1985-02-25

1987-04-14

Hall, Carl E.

Metal working

Piezoelectric device making

310320, 310364, 310369, H01L 4122

Patent

active

046567070

ABSTRACT:
A method of fabricating a high-frequency piezoelectric resonator includes the steps of (a) forming a region of reduced thickness in a central portion of a quartz disk, a step zone being formed at the transition between the thinned region and the non-thinned region; (b) depositing a conductive tongue on the step so as to extend over a portion of the non-thinned region and over a portion of the thinned region; (c) mounting two lead attachments on the disk; and (d) depositing first and second electrodes on the disc, each electrode coupled to a respective one of the lead attachments, a portion of the first electrode being deposited on the conductive tongue.

REFERENCES:
patent: 2095376 (1937-10-01), Bechmann
patent: 2510811 (1950-06-01), Gale
patent: 3222622 (1965-12-01), Curran et al.
patent: 3396287 (1968-08-01), Horton
patent: 3694677 (1972-09-01), Guttwein et al.
patent: 3721841 (1973-03-01), Wilson
patent: 3940638 (1976-02-01), Teryama
patent: 4339683 (1982-07-01), Scott et al.
patent: 4517485 (1985-05-01), Berte et al.
L'Onde Electrique, vol. 59, No. 11, Nov. 1979; Paris (FR); M. Berie et al.: Resonateurs piezoelectriques a ondes de volume fonctionnant a des frequences fondamentales.
Resonaterus piezoelectriques a ondes de volume fonctionnant superierues a 100 MHZ.

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